Generate QR code
Open Access
Subscription Access
Technological Aspects of Forming Thin-film Functional Structures on the Surfaces of Accelerometer Units
https://doi.org/10.17586/0021-3454-2025-68-9-799-808
Abstract
The technology of forming thin-film functional coatings on flat surfaces of precision accelerometers by magnetron sputtering is considered using examples of aluminum deposition in the manufacture of a base plate for a sensitive element of a micromechanical accelerometer. A mathematical model of uniform thickness coating formation on a flat surface is presented, and the main significant parameters of the spraying process are determined. The optimized parameter is the orientation angle of the substrate relative to the magnetron target, and the optimization criterion is the minimum value of the standard deviation of the coating thickness. The effectiveness of the proposed model is confirmed by the practical results of studies of the characteristics of the coatings obtained.
Supporting agencies: The work was carried out with the financial support of the Ministry of Science and Higher Education of the Russian Federation, state assignment No. FSRM-2023-0009.
About the Authors
M. A. Tit
Concern CSRI Elektropribor JSC
Russian Federation
Russian Federation
Margarita A. Tit — Department of Technological Preparation of Production; Junior Researcher
St. Petersburg
О. S. Yulmetova
Concern CSRI Elektropribor JSC
Russian Federation
Russian Federation
Olga S. Yulmetova — Dr. Sci.; Department of Technological Preparation of Production; Head of Laboratory; Head of Sector
St. Petersburg
S. N. Belyaev
Concern CSRI Elektropribor JSC
Russian Federation
Russian Federation
Sergey N. Belyaev — PhD; Department of Technological Preparation of Production; Senior Researcher
St. Petersburg
S. A. Shcherbak
Alferov University
Russian Federation
Russian Federation
Sergey A. Shcherbak — PhD; Alferov University, Laboratory of Optics of Heterogeneous Structures and Optical Materials; Senior Researcher
St. Petersburg
A. G. Shcherbak
Concern CSRI Elektropribor JSC
Russian Federation
Russian Federation
Alexander G. Shcherbak — Dr. Sci; Department of Technological Preparation of Production; Head of Sector
St. Petersburg
References
1. Yulmetova O.S. Ionno-plazmennyye i lazernyye tekhnologii v giroskopicheskom priborostroyenii (Ion-plasma and Laser Technologies in Gyroscopic Instrumentation), Doctor’s thesis, St. Petersburg, 2019, 244 р. (in Russ.)
2. Belyaev S.N., Shcherbak A.G. Materialy XXXIII konferentsii pamyati N.N. Ostryakova (Proceedings of the XXXIII Conference in Memory of N.N. Ostryakov), October 4-6, 2022. (in Russ.)
3. Raspopov V.Ya. Mikromekhanicheskiye pribory (Micromechanical Devices), Tula, 2002, рр. 7–95. (in Russ.)
4. Electronics: Science, Technology, Business, 2009, no. 7. (in Russ.)
5. Petropavlovsky Yu. Radio pilot, 2015, November. (in Russ.)
6. Boyko A., Zavodin O.A., Simonov B. Electronics: Science, Technology, Business, 2009, no. 8, pp. 100–103. (in Russ.)
7. Bozhkov V.G. Kontakty metall–poluprovodnik: fizika i modeli (Metal-Semiconductor Contacts: Physics and Models), Tomsk, 2016, 528 р. (in Russ.)
8. Danilin B.S., Syrchin V.K. Magnetronnyye raspylitel'nyye sistemy (Magnetron Sputtering Systems), Moscow, 1982, 72 р. (in Russ.)
9. Danilin B.S. Primeneniye nizkotemperaturnoy plazmy dlya naneseniya tonkikh plenok (Application of Low-Temperature Plasma for Thin Film Deposition), Moscow, 1989, 328 р. (in Russ.)
10. Chernigovsky V.V., Martynyukov S.A., Lisenkov A.A., Kostrin D.K. Proceedings of Saint Petersburg Electrotechnical University, 2018, no. 4, pp. 5–12. (in Russ.)
11. Saghatelyan G.R., Shishlov A.V. Science and Education. Bauman Moscow State Technical University. Electronic journal, 2014, no. 11, pp. 458–481. (in Russ.)
12. Morachevsky A.G. et al. Prikladnaya khimicheskaya termodinamika (Applied Chemical Thermodynamics), St. Petersburg, 2008, 254 р. (in Russ.)
13. Lyakishev N.P., ed., Diagrammy sostoyaniya dvoynykh metallicheskikh sistem (Phase Diagrams of Binary Metallic Systems), Moscow, 1996, vol. 1, 992 р. (in Russ.)
14. Usoltseva D.S. Elektronnaya, atomnaya struktura i fazovyy sostav kompozitnykh Al-Si (Electronic, Atomic Structure and Phase Composition of Composite Al-Si), Candidate’s thesis, Voronezh, 2018. (in Russ.)
15. Cherkunov V.I. Proceedings of Saint Petersburg Electrotechnical University, 2025, no. 1(18), pp. 1421, DOI: 10.32603/2071-8985-2025-18-1-14-21. (in Russ.)
Review
For citations:
Tit M.A., Yulmetova О.S., Belyaev S.N., Shcherbak S.A., Shcherbak A.G. Technological Aspects of Forming Thin-film Functional Structures on the Surfaces of Accelerometer Units. Journal of Instrument Engineering. 2025;68(9):799-808. (In Russ.) https://doi.org/10.17586/0021-3454-2025-68-9-799-808
Views:
41
Email this article 