Spatial micro-scanning of plane-parallel glass plate surface by the interference method
https://doi.org/10.17586/0021-3454-2023-66-8-688-695
Abstract
Plane-parallel glass plates for spatial micro-scanning of the surface by the interference method are studied. The need to control the quality of optical surfaces for high-precision optical instruments and systems determines the relevance of the work. The appearance of the interferometer is presented, the optical scheme and technical characteristics of the device are given. As a result of experimental measurements, interferograms of the surfaces of optical plane-parallel plates are obtained with an error of no more than 0.05λ. The dependences of the reflection coefficient on the longitudinal and transverse displacements of the surface are obtained. Graphic dependences shows that all surfaces of the studied samples have uniform distributions in the range from K = 19–20.2 %.
About the Authors
E. E. Maiorov
St. Petersburg State University of Aerospace Instrumentation
Russian Federation
Russian Federation
Evgeny E. Maiorov — PhD, Associate Professor; Department of Applied Mathematics
St. Petersburg
Yu. M. Borodyansky
The Bonch-Bruevich St. Petersburg State University of Telecommunications
Russian Federation
Russian Federation
Yury M. Borodyansky — PhD, Associate Professor; Department of Information Systems Security
St. Petersburg
V. V. Kurlov
St. Petersburg State University of Aerospace Instrumentation
Russian Federation
Russian Federation
Viktor V. Kurlov — PhD, Associate Professor; Department of Innovation and Integrated Quality Systems
St. Petersburg
I. S. Tayurskaya
St. Petersburg University of Management Technologies and Economics
Russian Federation
Russian Federation
Irina S. Tayurskaya — PhD, Associate Professor; Department of Information Technology and Mathematics
St. Petersburg
V. P. Pushkina
St. Petersburg State University of Aerospace Instrumentation
Russian Federation
Russian Federation
Vera P. Pushkina — PhD, Associate Professor; Associate Professor; Department of Higher Mathematics and Mechanics
St. Petersburg
R. B. Guliyev
University under the Inter-Parliamentary Assembly of EurAsEC
Russian Federation
Russian Federation
Ramiz Balahan oglu Guliyev — PhD, Associate Professor; Department of Mathematics and Information Technologies
St. Petersburg
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Review
For citations:
Maiorov E.E., Borodyansky Yu.M., Kurlov V.V., Tayurskaya I.S., Pushkina V.P., Guliyev R.B. Spatial micro-scanning of plane-parallel glass plate surface by the interference method. Journal of Instrument Engineering. 2023;66(8):688-695. (In Russ.) https://doi.org/10.17586/0021-3454-2023-66-8-688-695
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