For citations:
Maiorov E.E., Borodyansky Yu.M., Kurlov V.V., Tayurskaya I.S., Pushkina V.P., Guliyev R.B. Spatial micro-scanning of plane-parallel glass plate surface by the interference method. Journal of Instrument Engineering. 2023;66(8):688-695. (In Russ.) https://doi.org/10.17586/0021-3454-2023-66-8-688-695