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Journal of Instrument Engineering

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Maiorov E.E., Borodyansky Yu.M., Kurlov V.V., Tayurskaya I.S., Pushkina V.P., Guliyev R.B. Spatial micro-scanning of plane-parallel glass plate surface by the interference method. Journal of Instrument Engineering. 2023;66(8):688-695. (In Russ.) https://doi.org/10.17586/0021-3454-2023-66-8-688-695

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ISSN 0021-3454 (Print)
ISSN 2500-0381 (Online)