Effect of Fused Quartz Structuring by Laser-Induced Microplasma and Purification on Multisector Binary Phase Plates Operation
https://doi.org/10.17586/0021-3454-2022-65-10-747-762
Abstract
For each stage of phase optical elements (POEs) production, including the POEs recording with laserinduced microplasma and post-processing, the influence on the microgeometry parameters of the microrelief formed on the POE surface, which ensures their high quality and energy conversion efficiency, is studied. The conditions for the each of the POE manufacturing stages implementation providing repeatability of the stage results in terms of the formed microgeometry relief depth and characteristics of its surface roughness, are given. All the studies are carried out using multi-sector binary phase plates chosen for their relative simplicity of design compared to other POEs of a similar purpose. It is shown that the best results on the PHE surface roughness with the complete elimination of graphite particles polluting the surface of multisectoral binary phase plates and possible micro/nanodefects and stresses arising during recording by laser-induced microplasma technology, are achieved by post-processing in the form of annealing at a temperature of 900 ° C for 1 h.
Keywords
aser-induced microplasma,
cluster ablation,
post-processing,
phase optical elements,
multi-sector binary phase plates,
fused quartz
Supporting agencies: The study was carried out with the financial support of the grant of the NORMA FT MF of ITMO University. The authors express their gratitude to Laser Center LLC for the equipment provided and to Oleg Sergeevich Vasiliev, Head of the Support and Technology Department, for consultations.
About the Authors
G. K. Kostyuk
ITMO University
Russian Federation
Russian Federation
Galina K. Kostyuk — PhD, Faculty of Nanoelectronics; Research Fellow
St. Petersburg
D. S. Stepanyuk
ITMO University
Russian Federation
Russian Federation
Dmitriy S. Stepanyuk — Faculty of Nanoelectronics; Laboratory Assistant
St. Petersburg
V. A. Shkuratova
ITMO University
Russian Federation
Russian Federation
Victoria A. Shkuratova — MSc, Faculty of Nanoelectronics
St. Petersburg
A. A. Petrov
ITMO University
Russian Federation
Russian Federation
Andrey A. Petrov — PhD, Faculty of Nanoelectronics; Senior Lecturer
St. Petersburg
N. A. Nesterov
ITMO University
Russian Federation
Russian Federation
Nikita A. Nesterov — Faculty of Nanoelectronics
St. Petersburg
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Review
For citations:
Kostyuk G.K., Stepanyuk D.S., Shkuratova V.A., Petrov A.A., Nesterov N.A. Effect of Fused Quartz Structuring by Laser-Induced Microplasma and Purification on Multisector Binary Phase Plates Operation. Journal of Instrument Engineering. 2022;65(10):747-762. (In Russ.) https://doi.org/10.17586/0021-3454-2022-65-10-747-762
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