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Millimeter-range ellipsometry in problems of composite materials diagnostics

https://doi.org/10.17586/0021-3454-2023-66-6-489-500

Abstract

Ellipsometry is an effective tool for measuring the optical constants and structural parameters of the surface – the interface between media, studying the physical and chemical processes occurring on the surface. The purpose of the work is to create a working layout of a millimeter-range ellipsometer optimized for a frequency of 140 GHz. In creation of the millimeter-wave ellipsometer, original quasi-optical elements developed earlier are used - linear and circular polarizers, made in the form of thin-film polymer-based metasurfaces. Experimental studies of quasi-optical elements characteristics and methodological errors due to the "imperfection" of the elements are carried out. The results of measurements of the optical constants of composite materials based on carbon fibers in the range of 140 GHz are presented. An ellipsometric experiment is performed to detect internal defects in composite products. The results of the study make it possible to conclude that millimeter-range ellipsometry may be used successfully in solving problems of surface engineering in the study of micro-heterogeneous dispersion systems.

About the Authors

V. N. Fedorinin
Rzhanov Institute of Semiconductor Physics of the SB RAS, Design and Technology Institute of Applied Microelectronics
Russian Federation

Victor N. Fedorinin — PhD; Rzhanov Institute of Semiconductor Physics of the SB RAS, Design and Technology Institute of Applied Microelectronics, Department of Photochemical Technologies; Leading Engineer.

Novosibirsk



S. A. Kuznetsov
Rzhanov Institute of Semiconductor Physics of the SB RAS, Design and Technology Institute of Applied Microelectronics; Novosibirsk State University
Russian Federation

Sergei A. Kuznetsov — Rzhanov Institute of Semiconductor Physics of the SB RAS, Design and Technology Institute of Applied Microelectronics, Department of Photochemical Technologies; Researcher.

Novosibirsk



V. A. Shvets
Rzhanov Institute of Semiconductor Physics of the SB RAS
Russian Federation

Vasily A. Shvets — Dr. Sci.; Rzhanov Institute of Semiconductor Physics of the SB RAS, Laboratory of Ellipsometry of Semiconductor Materials and Structures; Leading Researcher.

Novosibirsk



A. V. Arzhannikov
Novosibirsk State University; Budker Institute of Nuclear Physics of the SB RAS
Russian Federation

Andrey V. Arzhannikov — Dr. Sci. Professor; профессор; Novosibirsk State University, Department of Plasma Physics; Chief Researcher.

Novosibirsk



A. V. Gelfand
Rzhanov Institute of Semiconductor Physics of the SB RAS, Design and Technology Institute of Applied Microelectronics
Russian Federation

Alexander V. Gelfand - Rzhanov Institute of Semiconductor Physics of the SB RAS, Design and Technology Institute of Applied Microelectronics, Department of Photochemical Technologies; Head of the Department.

Novosibirsk



A. Yu. Gorshkov
Rzhanov Institute of Semiconductor Physics of the SB RAS, Design and Technology Institute of Applied Microelectronics
Russian Federation

Alexander Yu. Gorshkov - Rzhanov Institute of Semiconductor Physics of the SB RAS, Design and Technology Institute of Applied Microelectronics; Leading Design Engineer.

Novosibirsk



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Review

For citations:


Fedorinin V.N., Kuznetsov S.A., Shvets V.A., Arzhannikov A.V., Gelfand A.V., Gorshkov A.Yu. Millimeter-range ellipsometry in problems of composite materials diagnostics. Journal of Instrument Engineering. 2023;66(6):489-500. (In Russ.) https://doi.org/10.17586/0021-3454-2023-66-6-489-500

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ISSN 0021-3454 (Print)
ISSN 2500-0381 (Online)